Theoretical model and computer simulation results of enhanced diffusion of high-temperature implanted aluminum in silicon carbide

✍ Scribed by G.V. Gadiyak

• Book ID: 114170261
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 124 KB
• Volume: 142
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00253-5