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Theoretical interpretation of the optical constants of thin metallic layers


Publisher
Elsevier Science
Year
1963
Tongue
English
Weight
86 KB
Volume
13
Category
Article
ISSN
0042-207X

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Effect of process parameters on the opti
✍ Tompkins, Harland G.; Baker, Jeffrey H.; Convey, Diana πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 78 KB πŸ‘ 2 views

In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower