Theoretical and experimental study of high fluence germanium implantation into silicon. Contribution of atomic mixing

✍ Scribed by A Gras-Marti; JJ Jimenez-Rodriguez; J Peon-Fernandez; M Rodriguez-Vidal; NP Tognetti; G Carter; MJ Nobes; DG Armour

• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 439 KB
• Volume: 32
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(82)94066-0