Theoretical and experimental study of high fluence germanium implantation into silicon. Contribution of atomic mixing: A Gras-Marti et al,Vacuum, 32 (7), 1982, 433–437

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 170 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90269-6