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Theoretical and experimental investigations on the deposition rate and processes of parallel incident laser-induced CVD

✍ Scribed by A. Tate; K. Jinguji; T. Yamada; N. Takato

Publisher: Springer
Year: 1985
Tongue: English
Weight: 552 KB
Volume: 38
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00616500

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