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Theoretical and experimental analysis on super precision grinding of monocrystal silicon

✍ Scribed by Guo, Xiaoguang ;Guo, Dongming ;Kang, Renke ;Jin, Zhuji

Book ID: 107378208
Publisher: Higher Education Press and Springer
Year: 2007
Tongue: English
Weight: 763 KB
Volume: 2
Category: Article
ISSN: 1673-3479
DOI: 10.1007/s11465-007-0023-9

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