The versatile technique of RF plasma etching : Adir Jacob. Solid-St. Technol. p. 70 (September 1976)

• Book ID: 103274354
• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 119 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90074-9