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The validity of Bohm’s sheath criterion in rf discharges

✍ Scribed by Riemann, K.-U.

Book ID: 121232016
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 978 KB
Volume: 4
Category: Article
ISSN: 0899-8221
DOI: 10.1063/1.860189

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