𝔖 Bobbio Scriptorium

✦ LIBER ✦

Study of the plasma pre-sheath in magnetron discharges dominated by Bohm diffusion of electrons

✍ Scribed by Bradley, J W

Book ID: 121434520
Publisher: Institute of Physics
Year: 1998
Tongue: English
Weight: 188 KB
Volume: 7
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/7/4/014

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Comparative study of the effect of therm

Comparative study of the effect of thermal annealing on the hydrogen stability and the stress in a-C:H films deposited by electron cyclotron resonance glow discharge and direct current multipolar plasma methods

✍ M Benlahsen; B Racine; M Clin; K Zellama 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 123 KB