The use of narrow-beam glow discharge and broad-beam kaufman-type sources in sputtering velocity and yield measurements

✍ Scribed by Zbigniew W. Kowalski

• Publisher: Springer
• Year: 1988
• Tongue: English
• Weight: 216 KB
• Volume: 7
• Category: Article
• ISSN: 0261-8028
• DOI: 10.1007/bf00723785