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The use of different plasma gases (Ar, N2and air) for CMP-OES: figures of merit and temperature measurements

✍ Scribed by N. H. Bings; J. A. C. Broekaert

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Use of a capacitively coupled microwave

✍ M. Seelig; N. H. Bings; J. A. C. Broekaert 📂 Article 📅 1998 🏛 Springer 🌐 English ⚖ 58 KB

Rotational temperature measurements in a

✍ C.O. Laux; R.J. Gessman; C.H. Kruger; F. Roux; F. Michaud; S.P. Davis 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 425 KB

Intensities, self-broadening, and broade

✍ Carlos B. Suárez; Francisco P.J. Valero 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 893 KB

Measurement at different temperatures of

✍ Francisco P.J. Valero; Carlos B. Suarez 📂 Article 📅 1978 🏛 Elsevier Science 🌐 English ⚖ 858 KB

Spectroscopic measurements of the electr

✍ Gordillo-Vázquez, F J; Camero, M; Gómez-Aleixandre, C 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 479 KB