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The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations

✍ Scribed by Wang, Cong; Huo, Haibin; Johnson, Michael; Shen, Mengyan; Mazur, Eric

Book ID
118045368
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
810 KB
Volume
21
Category
Article
ISSN
0957-4484

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## Abstract Processing of Teflon AF surface was made with laser light at 157 nm with nano‐resolution control. Thin films of Teflon AF layers, 0.58 and 2.4 nm thick on the average, were removed following surface etching in nitrogen and vacuum respectively at 1 mJ/cm^2^. AFM imaging and mass spectros