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The thinning of a silicon/silicon oxide wafer for transmission electron microscopy

✍ Scribed by R.A. Bayles; W.A. Jesser

Publisher: Elsevier Science
Year: 1977
Weight: 748 KB
Volume: 8
Category: Article
ISSN: 0047-7206
DOI: 10.1016/0047-7206(77)90007-3

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