The synthesis and evaluation of cyclic olefin sulfone copolymers and terpolymers as electron beam resists

✍ Scribed by Edward Gipstein; Wayne Moreau; George Chiu; Omar U. Need III

• Publisher: John Wiley and Sons
• Year: 1977
• Tongue: English
• Weight: 734 KB
• Volume: 21
• Category: Article
• ISSN: 0021-8995
• DOI: 10.1002/app.1977.070210309