𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The structures and magnetic properties of FeN films prepared by the facing targets sputtering method

✍ Scribed by Jiang, En-yong; Sun, Chang-qing; Li, Jin-e; Liu, Yu-guang

Book ID
120734291
Publisher
American Institute of Physics
Year
1989
Tongue
English
Weight
733 KB
Volume
65
Category
Article
ISSN
0021-8979

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Preparation of aluminum thin films by th
Preparation of aluminum thin films by the facing targets sputtering system
✍ Toyoaki Hirata; Masao Nagakubo; Masahiko Naoe πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 383 KB

The facing targets sputtering (FTS) system, typical of plasma-free sputtering systems, was used to deposit aluminum thin films composed of very fine grains with a smooth surface, large hardness and low resistivity. When the argon gas pressure PAr was as low as 10-' Pa, the aluminum films deposited a