Structural and photoluminescence propert
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J.J. Ding; H.X. Chen; S.Y. Ma
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Article
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2010
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Elsevier Science
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English
⚖ 475 KB
Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin