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The structure of theL2,3VV-auger line of silicon and silicon compounds

✍ Scribed by R. Weißmann; W. Schnellhammer; R. Koschatzky; K. Müller


Publisher
Springer
Year
1977
Tongue
English
Weight
391 KB
Volume
14
Category
Article
ISSN
1432-0630

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Auger line shape analysis of hydrogenate
✍ N.A. Burnham; A.B. Swartzlander; A.J. Nelson; L.L. Kazmerski 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 289 KB

Auger line shape analysis of the Si L23VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23VV peak was deconvoluted into its L23