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The structure of gold silicide in thin Au/Si films

โœ Scribed by H.L. Gaigher; N.G. Van Der Berg


Book ID
107862786
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
381 KB
Volume
68
Category
Article
ISSN
0040-6090

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The structural evolution in fiber-textured Ti / Si thin films was investigated by in-situ X-ray diffraction in the temperature range preceding the formation of silicide compounds. Abnormal thermal behaviour of both 002 and 101 diffraction profiles was observed at 360 and 450 8C, which could be under