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The structure of copper-doped amorphous hydrogenated carbon films

✍ Scribed by T. N. Vasilevskaya; N. S. Andreev; I. A. Drozdova; V. N. Filipovich; S. G. Yastrebov; T. K. Zvonareva

Book ID
110119213
Publisher
SP MAIK Nauka/Interperiodica
Year
1999
Tongue
English
Weight
498 KB
Volume
41
Category
Article
ISSN
1063-7834

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Nanostructured hydrogenated amorphous ca
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## Abstract The synthesis of nanostructured hydrogenated amorphous carbon (a‐C:H) films doped with nitrogen using microwave‐assisted surface wave plasma chemical vapour deposition on quartz and p‐silicon substrates is reported. By controlling the deposition parameters, the Tauc band gap has been va