The structure and composition of contacts made of AL(2% Cu)TiW films on amorphized (100) silicon

✍ Scribed by S. Berger; Y. Komem; I. Blech

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 721 KB
• Volume: 176
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(89)90370-2