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The statistical sputtering contribution to resolution in concentration-depth profiles

✍ Scribed by M.P. Seah; J.M. Sanz; S. Hofmann

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 431 KB
Volume: 81
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(81)90486-7

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