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The stability of zinc oxide transparent electrodes fabricated by R.F. magnetron sputtering

โœ Scribed by T. Minami; H. Nanto; S. Shooji; S. Takata


Book ID
103427830
Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
483 KB
Volume
111
Category
Article
ISSN
0040-6090

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Indium-doped zinc oxide films prepared b
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## Indium -doped zinc oxide (ZnO : In) films were prepared by simultaneous r.f. and d.c. magnetron sputtering. The structural, optical and electrical properties of the films have been obtained by x-ray diffractometry (XRD), Rutherford backscattering spectrometry (RBS), spectrophotometry and atomic