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The sputtering of insulating materials by fast heavy ions

โœ Scribed by L.E. Seiberling; C.K. Meins; B.H. Cooper; J.E. Griffith; M.H. Mendenhall; T.A. Tombrello


Publisher
Elsevier Science
Year
1982
Weight
579 KB
Volume
198
Category
Article
ISSN
0167-5087

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