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Sputtering of insulators due to electronic excitation, by fast ions and electrons

✍ Scribed by R.E. Johnson; W.L. Brown

Publisher: Elsevier Science
Year: 1983
Weight: 613 KB
Volume: 209-210
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0167-5087(83)90840-2

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