The split-cross-bridge resistor for measuring the sheet resistance, linewidth, and line spacing of conducting layers

✍ Scribed by Buehler, M.G.; Hershey, C.W.

• Book ID: 114595704
• Publisher: IEEE
• Year: 1986
• Tongue: English
• Weight: 818 KB
• Volume: 33
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1986.22709