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The space-time-averaging procedure and modeling of the RF discharge II. Model of collisional low-pressure RF discharge

โœ Scribed by Kaganovich, I.D.; Tsendin, L.D.


Book ID
117862044
Publisher
IEEE
Year
1992
Tongue
English
Weight
853 KB
Volume
20
Category
Article
ISSN
0093-3813

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