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Analytical model for the behavior of electric fields in a collisional low-pressure RF discharge

✍ Scribed by V. A. Lisovskii; V. D. Egorenkov

Book ID: 110545822
Publisher: Springer
Year: 1998
Tongue: English
Weight: 465 KB
Volume: 41
Category: Article
ISSN: 1573-9228
DOI: 10.1007/bf02514557

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