The selectivity of poly Si and SiO2 etching using a negative dc biasing of powered electrode

✍ Scribed by Jozef Brčka; Rudolf Harman; Anthony Blackburn

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 259 KB
• Volume: 36
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(86)90241-1