The selectivity of poly Si and SiO2 etching using a negative dc biasing of powered electrode : Jozef Brcka and Rudolf Harman. Vacuum36(7–9), 531 (1986)

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 135 KB
• Volume: 27
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(87)90159-4