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The secondary ions emission from Si under low-energy Cs bombardment in a presence of oxygen

✍ Scribed by A. Merkulov

Book ID: 115562043
Publisher: John Wiley and Sons
Year: 2012
Tongue: English
Weight: 241 KB
Volume: 45
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.5132

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