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The roles of hydrogen and fluorine in the deposition of cubic boron nitride films in the Ar–N2–BF3–H2 system

✍ Scribed by W.J Zhang; S Matsumoto

Book ID
108312086
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
175 KB
Volume
330
Category
Article
ISSN
0009-2614

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