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The role of pressure on thin amorphous carbon films deposited using microwave surface wave plasma CVD

โœ Scribed by Ghimire, Dilip Chandra; Adhikari, Sudip; Uchida, Hideo; Umeno, Masayoshi


Book ID
121385377
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
256 KB
Volume
15
Category
Article
ISSN
0925-9635

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