The role of atomic hydrogen in pre-epitaxial silicon substrate cleaning

✍ Scribed by A. Aßmuth; T. Stimpel-Lindner; O. Senftleben; A. Bayerstadler; T. Sulima; H. Baumgärtner; I. Eisele

• Book ID: 108060258
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 538 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.04.005