The Reactive Ion Etching of Gallium Nitride by Methylchloride/Hydrogen

✍ Scribed by Dineen, M. ;Thomas, H. ;Humphreys, B. ;McMeekin, S. G.

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 128 KB
• Volume: 176
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199911)176:1<739::aid-pssa739>3.0.co;2-v