The pyrolytic decomposition of metal alkoxides(di-acetoxy-di-t-butoxy-silane, DADBS) during chemical vapour deposition of thin oxide films

✍ Scribed by R. Hofman; J.G.F. Westheim; V.A.C. Haanappel; T. Fransen; P.J. Gellings

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 422 KB
• Volume: 215
• Category: Article
• ISSN: 0040-6031
• DOI: 10.1016/0040-6031(93)80109-n