The pyrolytic decomposition of aluminium-tri-sec-butoxide during chemical vapour deposition of thin alumina films

✍ Scribed by V.A.C. Haanappel; H.D. van Corbach; T. Fransen; P.J. Gellings

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 658 KB
• Volume: 240
• Category: Article
• ISSN: 0040-6031
• DOI: 10.1016/0040-6031(94)87029-2