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The pyrolysis of precursors for GaAs MOCVD studied by in-situ and ex-situ Fourier transform infrared spectroscopy

✍ Scribed by S.R. Armstrong; R.D. Hoare; M.E. Pemble; I.M. Povey; A. Stafford; A.G. Taylor; J.O. Williams


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
514 KB
Volume
124
Category
Article
ISSN
0022-0248

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