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The preparation of hydrogenated amorphous silicon by plasma-enhanced reactive evaporation

✍ Scribed by R.V. Kruzelecky; D. Racansky; S. Zukotynski; F. Gaspari; C.I. Ukah; J.M. Perz

Book ID: 115986815
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 992 KB
Volume: 108
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(89)90339-6

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