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The Preparation and Properties of (111)Si Films Grown on Sapphire by the SiH[sub 4]-H[sub 2] Process

✍ Scribed by Manasevit, H. M.

Book ID: 121737172
Publisher: The Electrochemical Society
Year: 1976
Tongue: English
Weight: 712 KB
Volume: 123
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2132764

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