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The precision of the femtosecond-pulse laser ablation of TiN films on silicon

✍ Scribed by J. Bonse; M. Geuss; S. Baudach; H. Sturm; W. Kautek

Publisher
Springer
Year
1999
Tongue
English
Weight
163 KB
Volume
69
Category
Article
ISSN
1432-0630

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