The assessment of microscopic charging e
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Marion A. Stevens-Kalceff; Katie J. Levick
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Article
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2007
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John Wiley and Sons
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English
β 358 KB
## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or preβexisting de