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Charging and discharging of dielectric films irradiated by high-/medium-/low-energy electrons

✍ Scribed by Yang Zhaoming; Zhou Yanping; Ge Reihong

Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
516 KB
Volume
15
Category
Article
ISSN
0094-5765

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## Abstract Energetic beams of electrons and ions are widely used to probe the microscopic properties of materials. Irradiation with charged beams in scanning electron microscopes (SEM) and focused ion beam (FIB) systems may result in the trapping of charge at irradiation induced or pre‐existing de