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The optical measurement on the CVD silica film deposited on a fused quartz substrate

✍ Scribed by Wen-Hao Cho; Donyau Chiang; Wen-Hong Wu; Yung-Hsiang Chen; Po-Kai Chiu; Shen-Yu Hsu


Book ID
113846623
Publisher
Elsevier
Year
2011
Tongue
English
Weight
368 KB
Volume
19
Category
Article
ISSN
1875-3892

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CO Laser-induced chemical vapor deposition (LCVD) is being investigated as a possible technique of depositing uniform 2 carbon coatings on moving fused quartz substrates. A CO laser is used to locally heat the substrate surface and create a hot 2 spot where pyrolysis of hydrocarbon species occurs an