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The optical and mechanical properties of carbon films grown using a fast atom beam source

✍ Scribed by A. Dehbi-Alaoui; A. Matthews; J. Franks


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
483 KB
Volume
47
Category
Article
ISSN
0257-8972

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Characterization of carbon nitride films
✍ Zeze, D. A.; O'Toole, E. P.; Crawford, R. I.; Cui, N.; Anderson, C. A.; Brown, N πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 190 KB

The Ðlms addressed here were grown using adamantane vapour in Γ‘owing argon/nitrogen mixtures in an (C 10 H 16 ) inductively-coupled plasma processing (ICP) vacuum rig. The Ðlms were characterized by XPS, AES, infrared spectroscopy (Fourier transform infrared (FTIR) in transmission) and atomic force