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The modulation on luminescence of Er3+-doped silicon-rich oxide films by the structure evolution of silicon nanoclusters

✍ Scribed by Lu Jin, Dongsheng Li, Luelue Xiang, Feng Wang, Deren Yang…

Book ID
120947690
Publisher
Springer-Verlag
Year
2013
Tongue
English
Weight
522 KB
Volume
8
Category
Article
ISSN
1931-7573

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Nd-and Er-doped silicon rich oxide (SRO) thin films were prepared by rf-sputtering. Different films were obtained by changing target configurations. Al and Al 2 O 3 targets were used to obtain along with silicon rich silicon oxide (SRSO) films, Al-modified SRSO films and silicon rich aluminosilicate