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The mechanical strength of polysilicon films: Part 1. The influence of fabrication governed surface conditions

✍ Scribed by Ioannis Chasiotis; Wolfgang G Knauss

Book ID: 108359677
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 971 KB
Volume: 51
Category: Article
ISSN: 0022-5096
DOI: 10.1016/s0022-5096(03)00051-6

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