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The localized gas discharge etching of materials

✍ Scribed by A. V. Abramov; E. A. Abramova; I. S. Surovtsev

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Dimensional etching of silicon and silic

✍ A. V. Abramov, E. A. Abramova, I. S. Surovtsev 📂 Article 📅 2005 🏛 Springer 🌐 English ⚖ 288 KB

Modeling the High-Voltage Gas-Discharge-

✍ V. A. Kolpakov 📂 Article 📅 2002 🏛 Springer 🌐 English ⚖ 134 KB

Anisotropic Etching of SiO2in High-Volta

✍ N. L. Kazanskii; V. A. Kolpakov; A. I. Kolpakov 📂 Article 📅 2004 🏛 Springer 🌐 English ⚖ 403 KB

Gas discharge etching as a method of inv

✍ L. I. Bezruk 📂 Article 📅 1969 🏛 Springer 🌐 English ⚖ 493 KB

Improved gas-discharge etching technique

✍ L.I. Bezruk; G.A. Gorokhovskii; Yu.S. Lipatov 📂 Article 📅 1968 🏛 Elsevier Science ⚖ 483 KB

The use of gas-discharge etching for the

✍ A.Ye. Chalykh; I.I. Petrova; B.N. Dinzburg; V.M. Luk'yanovich; N.V. Smirnova 📂 Article 📅 1973 🏛 Elsevier Science ⚖ 727 KB