The lateral diffusion of boron in polycrystalline silicon and its influence on the fabrication of sub-micron MOSTs : D. J. Coe. Solid-St. Electron.20, 985 (1977)

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 135 KB
• Volume: 17
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(78)91270-2