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The Kinetics and Mechanism of the Pyrolysis of Manganese and Manganese Silicide CVD Precursors

✍ Scribed by Douglas K. Russell; Iain M. T. Davidson; Andrew M. Ellis; Graham P. Mills; Mark Pennington; Ian M. Povey; J. Barrie Raynor; Sinan Saydam

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 221 KB
Volume: 4
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199805)04:03<103::aid-cvde103>3.0.co;2-h

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