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Radical Processes in the Pyrolysis of Trialkyl Compounds of Group 13 CVD Precursors

✍ Scribed by Douglas K. Russell; Graham P. Mills; J. Barrie Raynor; Andrew D. Workman

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 310 KB
Volume: 4
Category: Article
ISSN: 0948-1907
DOI: 10.1002/(sici)1521-3862(199803)04:02<61::aid-cvde61>3.0.co;2-r

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